Combination of optical measurement and precipitation theory to

zhangcunbiao

Combination of optical measurement and precipitation theory to
overcome the obstacles of detection limits
G. Kissinger
a,b,
,T.Muller
c
, A. Sattler
c
,W.Hackl
c
, P. Krottenthalerc
c
,
T. Grabollaa
, H. Richter
a,b
, W. von Ammonc
a
IHP, Im Technologiepark 25, 15236 Frankfurt (Oder), Germany
b
IHP/BTU Joint Lab, Universita ¨ tsplatz 3-4, 03044 Cottbus, Germany
c
Siltronic AG, Johannes-Hess-Street 24, 84489 Burghausen, Germany
Available online 17 February 2006