Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines

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Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines


1 Introduction to PowerMEMS ...................... 1
Alan H. Epstein
1.1 Compact Portable Power Considerations . ............. 2
1.2 Chemical Energy Sources ...................... 3
1.3 PowerSystemConsiderations.................... 6
1.4 Conclusion . ............................ 7
References ................................. 8
2 System Design Considerations and Device Overview ......... 9
Alan H. Epstein
2.1 Introduction . ............................ 9
2.2 Thermodynamic and Scaling Considerations ............ 9
2.2.1 Mechanics Scaling . . . .................. 12
2.3 OverviewofanMEMSGasTurbineEngineDesign........ 13
2.4 Bearings and Rotor Dynamics . .................. 15
2.5 Turbomachinery Fluid Mechanics ................. 17
2.6 StructuresandMaterials ...................... 19
2.6.1 Materials .......................... 19
2.6.2 StructuralDesignConsiderations.............. 20
2.7 Combustion ............................. 20
2.8 EngineControlsandAccessories.................. 23
2.8.1 EngineControls....................... 23
2.8.2 Sensors ........................... 23
2.8.3 Fuel Control Valves . . . .................. 24
2.8.4 Starter-Generator ...................... 25
2.9 Engine Design Trades, Component Integration,
andDesignEvolution........................ 28
2.9.1 Electric Micro Motor-Compressor and Turbine-Generator . 30
2.10Summary .............................. 30
References ................................. 31
3 Materials, Structures and Packaging .................. 33
S. Mark Spearing
3.1 Introduction . ............................ 33
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